Browse Topic: Microelectromechanical devices (MEMS)

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High-Performance, Piezoelectric, Hybrid Synthetic Jet ActuatorsTBMG-361813/1/2020
NASA Langley Research Center has invented three serial high-performance, piezoelectric, hybrid synthetic jet actuators to provide active flow control for current and future wing-borne vehicles in subsonic, transonic, and supersonic flow. Effective active flow control results in reduced vehicle drag and the prevention of events that can lead to catastrophic loss.
5 Ws of PAWS Smart HeadphonesTBMG-361993/1/2020
Pedestrians who wear headphones or earbuds to listen to music, text, or talk on smartphones while walking, putting themselves at risk by tuning out the traffic around them.
SiC-Based Microstructures for SensorsTBMG-358151/1/2020
Innovators at NASA's Glenn Research Center have developed ultra-thin silicon carbide (SiC) microstructures that enable highly sensitive pressure sensors that are biocompatible. The novel method of fabricating these microstructures, Dopant Selective Reactive Ion Etching (DSRIE), allows for structures as thin as 2 microns to be achieved, while allowing multifunctional sensors to be fabricated on a single SiC wafer. For the first time, it is possible to batch-fabricate ultra-thin SiC diaphragms that can sense very low pressures, enabling pressure sensors that can measure sub-psi pressures. This faster process makes it easier and less costly to produce complex, advanced semiconductors that are fully functional at temperatures greater than 600 °C. This technique enables a new generation of SiC-based microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) such as accelerometers, pressure sensors, and biosensors.
Particle Robot Works as a Cluster of Simple UnitsTBMG-358211/1/2020
Inspired by biological cells, researchers have developed computationally simple robots that connect in large groups to move around, transport objects, and complete other tasks. This “particle robotics” system comprises many individual disc-shaped units referred to as “particles.” The particles are loosely connected by magnets around their perimeters and each unit can only do two things: expand and contract. (Each particle is about 6” in its contracted state and about 9” when expanded.) That motion, when carefully timed, allows the individual particles to push and pull one another in coordinated movement. Onboard sensors enable the cluster to gravitate toward light sources.
Microrobot Powered by Soft MusclesTBMG-358281/1/2020
Researchers have developed a microrobot called RoboBee powered by soft artificial muscles that can crash into walls, fall onto the floor, and collide with other RoboBees without being damaged. It is the first microrobot powered by soft actuators to achieve controlled flight.
WiFi-Based Technique Measures Speed and Distance of Indoor MovementTBMG-3561012/1/2019
A technique was developed that uses a combination of WiFi signals and accelerometer technology to track devices in near-real-time. The WiFi-assisted Inertial Odometry (WIO) technique uses WiFi as a velocity sensor to accurately track how far something has moved — similar to sonar but using radio waves instead of sound waves.
Battery-Free Sensor for Underwater UseTBMG-3544311/1/2019
To investigate oceans, researchers aim to build a submerged network of interconnected sensors that sends data to the surface. Supplying constant power to scores of sensors designed to stay for long durations underwater has been a major problem.
High-Sensitivity, Low-Noise MEMS AccelerometerTBMG-3529410/1/2019
A high-sensitivity and low-noise MEMS accelerometer was developed using multi-layer metal structures composed of multiple metal layers. The accelerometer achieves 1 μG level resolution that has been a challenging task with conventional MEMS technology. The team previously proposed a method of using gold material to downscale the proof mass size of MEMS accelerometers to less than one-tenth. In this work, they have increased the proof mass per area by employing multiple layers of gold for the MEMS structures, thereby increasing the sensitivity over 100 times and reducing noise less than one-tenth when compared with conventional accelerometers.
Q&A: Wearable Motion Sensors Could Save Unborn BabiesTBMG-3527510/1/2019
Negar Tavossolian is Associate Professor of Electrical and Computer Engineering at Stevens Institute of Technology, Hoboken, NJ. She led a project to develop a lightweight, non-invasive sensor to monitor fetal heart rate and motion that could sense abnormalities warning of possible stillbirths.
The Rodney Dangerfield of Automated-Driving Sensors19AVEP07_067/1/2019
Radar and lidar get all the attention, but Inertial Measurement Units are the backbone of sensor fusion. Suppliers are scrambling to make IMUs more accurate-and much less expensive. The emerging era of highly-automated driving comes courtesy of much-vaunted sensor technology-spinning lasers, penetrating radar, sonar blips. But the sensor that gets the least respect in the technology stack could be the lynchpin for the mass roll-out of self-driving vehicles: the inertial measurement unit (IMU). “IMUs are the glue that binds everything together,” said Mike Horton, chief technology officer at Aceinna, a Boston-based company that develops sensing solutions for automotive applications. “An IMU can help bring different types of data together from GNSS (Global Navigation Satellite System), lidar and cameras to make everything consistent and smooth.”
Berman, Bradley
Wafer-Level Microchannel Fabrication Process for Lab-on-a-Chip DevicesTBMG-347617/1/2019
Microchannels fabricated into a silicon-Pyrex wafer with a diameter of 75 m and total channel length of 40, 60, 80, or 100 mm — characterized by specialized microbeads within the channel — have been successfully created, tested, and used at NASA Goddard Space Flight Center. Designed to collect and separate amino acids towards finding the building blocks of life on other planets, this technology could be essential to many other lab-on-a-chip or microfluidic applications.
Infrared Light-Focusing PlatformTBMG-346306/1/2019
Researchers have integrated two technologies widely used in applications such as optical communications, bio-imaging, and Light Detection and Ranging (LiDAR) systems to create a new infrared light-focusing system that combines the best features of both technologies while reducing the size of the optical system.
When You Need a Machine for Breathing, You’d Better Have Accurate SensorsTBMG-345916/1/2019
Medical ventilation technology has come far since the original iron lung was first used more than 90 years ago. Using negative pressure to ventilate, the patient was inserted into an airtight chamber looking like a prop from a Sci-Fi movie. The iron lung mimicked the physiological act of breathing. Pumps controlling airflow periodically increased and decreased air pressure within the chamber and thus indirectly in the patient’s chest. Lungs were inflated by applying negative pressure to the patient’s body and then when the pressure inside the chamber increased, it compressed the patient’s chest and forced them to exhale. But the machines were bulky and restricted a patient’s ability to move. So, when positive pressure ventilators were developed in the 1950s, the technology caught on. Patients were not restricted, and caregivers could better examine them. Modern ventilators use either a tracheal tube or mask to apply positive pressure and inflate the lung during inspiration.
A Sensor that Fits Like a GloveTBMG-345896/1/2019
We recently had a discussion with Sri Peruvemba, VP of Strategy at BeBop Sensors (Berkeley, CA), about the technology and applications for their two-dimensional fabric sensor material. I started by asking Sri about the unusual name for the company.
Sensors Expo Preview 2019TBMG-345846/1/2019
The 2019 Sensors Expo and Conference will be held at the McEnery Convention Center, San Jose, CA from June 25 – 27. Both the expo and conference are excellent opportunities to get a good sense of important sensor trends. Among the wide variety of themes at the conference, some strike me as being very significant for the current state of the industry.
Ultra-Low-Power Chips Enhance Performance of Small RobotsTBMG-345756/1/2019
An ultra-low-power hybrid chip inspired by the brain could help give palm-sized robots the ability to collaborate and learn from their experiences. Combined with new generations of low-power motors and sensors, the new application-specific integrated circuit (ASIC), which operates on milliwatts of power, could help intelligent swarm robots operate for hours instead of minutes.
Snake-Inspired RobotTBMG-345726/1/2019
Researchers have developed a new and improved snake-inspired soft robot that is faster and more precise than its predecessor.
Ultraminiature MEMS Sensors for Improved Patient OutcomesTBMG-344395/1/2019
Ultraminiature sensors (<1 mm in size) enable instrumentation of medical devices in order to advance monitoring capabilities, deliver new insight into complex cardiovascular cases, and optimize targeted treatment therapies. These high-performance medically proven sensors can advance medical devices with real-time monitoring capabilities with less invasive access and more reliable results. Whether integrated directly into an existing medical device or added to a complementary delivery system or procedural accessory, ultraminiature sensors can enable new revenue streams by increasing reimbursement opportunities or adding a new component to an existing sales channel.
High Resolution LiDAR Based on Single Chip SPAD Array2019-01-01194/2/2019
It is important that Advanced Driver Assistance Systems (ADAS) and Automated Driving Systems (AD) detect on-road objects, road vehicles and pedestrians. The typical detection devices mounted on ADAS and AD include a camera, a millimeter-wave radar and a Light Detection And Ranging (LiDAR). Since LiDAR can obtain accurate distance and fine spatial resolution due to its short wavelength, it is expected that small objects such as a tire can be detected. However, the conventional LiDAR is equipped with multiple light transmitters and light receivers such as avalanche photo diodes. This causes LiDAR system to be expensive and large in size. Aiming to reduce the cost and size of LiDAR, we employed Single-Photon Avalanche Diode (SPAD) which can be fabricated by CMOS process and easily arrayed. We also developed “Single Chip SPAD Array“ in which the two-dimensional array of SPAD and a signal processing block of range calculation were integrated into a single chip. The light-receiving area was composed of 260x12 SPAD-pixels array. In order to verify the principles, we designed a prototype of LiDAR on which a single chip SPAD array, a micro-electro-mechanical systems (MEMS) mirror as a scanner and 100W laser diode were mounted. The field-of-view was 55x9.1 degrees (HxV) and the vertical angular resolution split by SPAD array was 0.76 degrees. Using the prototype, we were able to detect the target of 10% reflectivity at a distance of 50m. Therefore, we succeeded in verifying the principles of sensitivity improvement by SPAD-LiDAR and simulated its behavior. Moreover, based on this result, we optimized SPAD pixels and LiDAR configuration and confirmed that it is possible to detect a piece of broken tire of around 4% reflectivity by the simulation on the assumption of an actual road scene under daylight.
Hata, Takehiro, Ozaki, Noriyuki, Murakami, Yoshihiro, Azuma, Kenta, Kashiwada, Shinji, Yanai, Kenichi
A Marriage of Light-Manipulation TechnologiesTBMG-339003/1/2019
Researchers have, for the first time, integrated two technologies widely used in applications such as optical communications, bio-imaging, and Light Detection and Ranging (LIDAR) systems. In the collaborative effort between the U.S. Department of Energy's Argonne National Laboratory and Harvard University, researchers successfully crafted a metasurface-based lens atop a Micro-Electro-Mechanical System (MEMS) platform. The result is a new infrared light-focusing system that combines the best features of both technologies while reducing the size of the optical system.
MEMS Switch Extends Life of CellphonesTBMG-339173/1/2019
A new type of microelectromechanical system (MEMS) was developed that uses electrostatic levitation to provide a more robust system. All cellphones use MEMS switches for wireless communication, but traditionally there are just two electrodes. The switches open and close numerous times during just one hour, but their current lifespan is limited by the two-electrode system.
Nanoscale Pillars Act as Memory FoamTBMG-339363/1/2019
A customizable nanomaterial was developed that combines metallic strength with a foam-like ability to compress and spring back. The material can store and release mechanical energy on the nanoscale, and fits into existing industrial semiconductor processes.
5 Ws of Spray-On AntennasTBMG-3340112/1/2018
Manufacturers and users of wearables, functional fabrics, mobile devices, wireless routers, and Internet of Things devices.
Inductive Non-Contact Position SensorTBMG-3340012/1/2018
The Inductive Non-Contact Position Sensor is a highly accurate sensor for motion control applications. The sensor was designed to monitor the precise movements of an optical inspection system that measured defects in space shuttle windows.
Dynamic Optical Grating Device for Modulating LightTBMG-3339912/1/2018
NASA Langley Research Center has developed a novel optical grating device that dynamically modulates light and is capable of controlling the spectral properties and propagation of light without any moving mechanical components.
Simulation for EveryoneTBMG-3341912/1/2018
With the computational power and software available today, numerical simulation is a real option to quickly get answers to complicated technical, scientific, and engineering questions. Not only has the hardware doubled computing capacity every 18 months or so over the past decades, but the numerical algorithms have improved at the same rate.
Q&A: Dr. Sheng Xu, Department of NanoEngineering and the Center for Wearable Sensors, Jacobs School of Engineering, University of California San DiegoTBMG-3309210/1/2018
A team led by UCSD has built a stretchable electronic patch that can be worn on the skin like a bandage and used to wirelessly monitor a variety of physical and electrical signals, from respiration and body motion, to temperature and eye movement, to heart and brain activity. The device is as small and thick as a U.S. dollar coin.
Products of Tomorrow: August 2018TBMG-324808/1/2018
This column presents technologies that have applications in commercial areas, possibly creating the products of tomorrow. To learn more about each technology, see the contact information provided for that innovation.
Micro-Optomechanical Pressure Sensor Advances Pressure Monitoring in Biomedical ApplicationsTBMG-2797312/1/2017
A new type of pressure sensor is based on micro-optomechanical systems (MOMS) technology. Developed by imec, a research and innovation hub focusing on nanoelectronics and digital technologies, the sensor exhibits an excellent measurement precision in a large pressure range while being compact, resistant to electromagnetic interference (EMI), and having multiplexing capabilities. Leveraging imec's unique technical expertise in both MEMS and photonics, the sensor can be used in applications that require high-quality sensing, notably in the medical and life sciences domains.
PC-Board-Mountable Corrosion SensorsTBMG-2766410/1/2017
Corrosion is a pervasive and expensive problem in applications ranging from construction to microelectronics. Corrosion has been widely studied in theories, and empirical studies exist for common materials, material combinations, and myriad environmental conditions. In order for microelectronic devices to perform and function properly, high-reliability packaging is important. Failure of microelectronic devices and packages not only causes a malfunction of the devices themselves, but can lead to catastrophic events for entire systems, which may cause loss of life, property, and safety.
Effect of Screens and Pinhole Size on Measured Fluctuating Surface Pressures Using a Micro-Electro-Mechanical Microphone Array2017-01-17836/5/2017
Surface pressure measurements using microphone arrays are still challenging, especially in an automotive context with cruising speeds around Mach 0.1. The separated turbulent boundary layer excitation and the side mirror wake flow generate both acoustic and aerodynamic components, which have wavenumbers that differ by a factor of approximately 10. This calls for high spatial resolution measurements to fully resolve the wavenumber-frequency spectrum. In a previous publication [1], the authors reported a micro-electro-mechanical (MEMS) surface microphone array that successfully used wavenumber analysis to quantify acoustic versus turbulence loading. It was shown that the measured surface pressure at each microphone could be strongly influenced by self-noise induced by the microphone “packaging”, which can be attenuated with a suitable windscreen. This paper reports the results of wind tunnel tests to more accurately define the sensitivity of the MEMS microphone array with and without windscreens. The tests involved controlled attached boundary layer flow measurements in the anechoic wind tunnel at University of Sherbrooke. Different microphone sensing ports are evaluated as well as different microphone windscreens.
Todter, Chris, Robin, Olivier, Bremner, Paul, Marchetto, Christophe, Berry, Alain
Angular Random Walk Estimation of a Time-Domain Switching Micromachined GyroscopeTBMG-266824/1/2017
The primary metrics that prohibit the use of microelectromechanical systems (MEMS) gyroscopes for navigation-grade inertial navigation units (IMUs) are angle random walk (ARW), bias instability, and scale factor instability. The need for MEMS gyroscopes is due to their decreased cost, size, weight, and power (CSWaP) constraints compared to current navigation-grade solutions. Note that to avoid confusion, while in a statistical context a random walk describes a particular type of random process, ARW is used herein to quantify the effects of white, or Gaussian, noise processes on the rate estimate of a gyroscope.
Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope17AERP04_104/1/2017
Achieving near navigation-grade performance without the need to produce resonators with very high quality factors. Space and Naval Warfare Systems Center Pacific, San Diego, California The primary metrics that prohibit the use of microelectromechanical systems (MEMS) gyroscopes for navigation-grade inertial navigation units (IMUs) are angle random walk (ARW), bias instability, and scale factor instability. The need for MEMS gyroscopes is due to their decreased cost, size, weight, and power (CSWaP) constraints compared to current navigation-grade solutions. Note that to avoid confusion, while in a statistical context a random walk describes a particular type of random process, ARW is used herein to quantify the effects of white, or Gaussian, noise processes on the rate estimate of a gyroscope. The accepted theory about how to mitigate effects associated with thermomechanical noise, and thus lower ARW, quality factors on the order of a million are needed. While resonators with quality factors on the order of a million have been demonstrated in laboratory settings, navigation-grade ARW has only been demonstrated in high-vacuum systems (<10 μTorr) that would be challenging to implement in a portable system. Other means of reducing ARW, such as increasing the amplitude of the drive mode, can be problematic. For electrostatically transduced devices, which is one of the more common methods used with MEMS, large oscillations can introduce nonlinear behavior such as electrostatic softening or pull-in.
Sonic Cyber Attack Shows Security Holes in Ubiquitous SensorsTBMG-267104/1/2017
Sound waves could be used to hack into critical sensors in a broad array of technologies including medical devices, smart-phones, automobiles, and the Internet of Things, University of Michigan research shows.
A Modular Apparatus and Method for Attaching Multiple DevicesTBMG-266464/1/2017
Scientists at NASA's Glenn Research Center have received several patents for fabrication methods that speed the production of silicon carbide (SiC) sensors and electronics, reduce fabrication costs, and enable advanced semiconductor functionality at temperatures greater than 600 °C. Glenn has developed a method for fabricating ultra-thin SiC microstructures using a dopant selective reactive ion etching (DSRIE) technique that can create extremely thin diaphragms (approximately 2 microns), increasing sensor sensitivity and resolution. In addition, Glenn has developed a modular protective packaging that allows SiC-based electronic devices to survive and operate reliably at very high temperatures. These innovations improve the real-time monitoring of high-temperature harsh environments, such as jet and rocket engines, allowing faster response times and more accurate readings.
Researchers Turn iPhone Camera into Optical SensorTBMG-264913/1/2017
By integrating an optical Micro-Electro-Mechanical Systems, or MEMS, chip into an iPhone camera, researchers at the VTT Technical Research Centre of Finland have developed a new, cost-effective kind of hyperspectral technology. The spectral device will provide mobile device users and consumers with new ways to monitor their environments, including quick food analysis, health checks, and other Internet-connected sensing. Research team leader Anna Rissanen works actively with companies to enable commercialization and new business development based on the team's various sensors.
Gas Sensors with Contact PadsTBMG-261561/1/2017
Innovators at NASA’s Glenn Research Center have developed advanced hydrogen and hydrocarbon gas sensors capable of detecting leaks, monitoring emissions, and providing in situ measurements of gas composition and pressure. These compact, rugged sensors can be used to optimize combustion and lower emissions, and they are designed to withstand harsh, high-temperature environments (e.g., silicon carbide (SiC) sensors can operate at 600 °C). NASA Glenn is actively seeking industrial partners to develop and apply these cutting-edge sensors cooperatively in new applications.
Piezoresistive SensorTBMG-253019/1/2016
The present innovation, developed at NASA’s Goddard Space Flight Center, comprises several piezoresistor sensor configurations for sensing rotation or torque that are superior to those currently in use in microelectromechanical (MEMS) devices. These may be used for sensing rotation/torque or any other quantity that can be converted by the sensor to a rotation (as is frequently done in sensors), and are therefore of wide applicability in current and future MEMS sensors.
Knee Monitor 'Listens' for Cracks, PopsTBMG-248716/26/2016
A knee band from the Georgia Institute of Technology uses microphones and vibration sensors to listen to and measure the sounds inside the joint. The sounds will help doctors determine whether a convalescing joint is healthy or requires more therapy.
Aerospace & Defense Technology: June 201616AERP066/1/2016
Digital Design Tools Simulating Thermal Expansion in Composites with Expanded Metal Foil for Lightning Protection Rugged Computing Designing VME Power Systems with Standard Modules Optical Sensors Optical Ice Sensors for UAVs Rotorcraft Technology Rotorcraft Icing Computational Tool Development RF & Microwave Technology Curled RF MEMS Switches for On-Chip Design: Design Software Supports BAE System's Mixed-Signal Chip Design
MEMS Oscillators with Improved Resilience for Harsh Automotive Environments2016-01-01014/5/2016
Oscillators are key components in automotive electronics systems. For example, a typical automotive camera module may have three or more oscillators, providing the clocks for microcontrollers, Ethernet controllers, and video chipsets. These oscillators have historically been built around a quartz crystal resonator connected to an analog sustaining circuit driving the crystal to vibrate at its resonant frequency. However, quartz-based devices suffer from poor performance and reliability in harsh automotive environments. SiTime has developed timing solutions based on silicon micro-electromechanical systems (MEMS) technology that exhibit better electromagnetic noise rejection and better performance under shock and vibration. In this paper, we first discuss the design and manufacturing of the MEMS-based device, with emphasis on the specific design aspects that improve reliability and resilience in harsh automotive environments. These aspects include the SOI-based MEMS fabrication process, the oscillator and state-of-the-art temperature compensation architecture, and the manufacturing and packaging process. We then describe the test methods used to evaluate the resilience of the device, including electromagnetic susceptibility (EMS), and performance during shock and vibration. The results show that the MEMS-based oscillator performs better than all quartz oscillators that were tested, with up to 50x better EMS, up to 24x better performance during shock, and up to 100x and 20x better performance during sinusoidal and random vibration, respectively.
Arft, Carl, Lu, Yin-Chen, Parvereshi, Jehangir
Fabrication of an Integrated Photonic Waveguide Joint in Micromachined SiliconTBMG-242554/1/2016
High-aspect-ratio silicon structures are necessary components in many MEMS (microelectromechanical systems). Aspect ratio is defined as the ratio of the height of the structure to its lateral width. The structures are typically fabricated through bulk micromachining steps such as deep reactive ion etching. In some cases, multiple levels of high-aspect-ratio structures are required. For instance, one may want to etch completely through a silicon wafer to thermally isolate a bolometer or provide waveguide coupling to an antenna defined on an insulating membrane, and at the same time have integrated high-topology structures required for microwave coupling or filtering. Definition of the structures typically uses photolithographic technology. But for high-aspect-ratio structures, spin cast resist becomes difficult to incorporate due to the non-uniform thickness of the resist around tall structures. One can cast very thick layers of photoresist, but this limits the minimum feature size, and additionally, very thick layers of photoresist are difficult to work with due to solvent release and moisture that can cause the resist to crack or swell. For electromagnetic reasons, the structures would preferably be made from conductive material such as metal or degeneratively doped silicon. The objective of this work was to incorporate multiple levels of conductive high-aspectratio structures with standard micromachining processes.
MEMS Glow Discharge Plasma Electron and Ion SourceTBMG-2327611/1/2015
A microelectromechanical system (MEMS) glow discharge plasma electron and ion source (GDEIS) was designed for operation in high-pressure environments such as planetary atmospheres for mass spectroscopy. Glow discharge electron/ ion sources create electrons and ions from gas molecules in an excited plasma. A plasma is generated between two charged plates, and the polarity induced determines the electron or ion signal.
Sideglass Turbulence and Wind Noise Sources Measured with a High Resolution Surface Pressure Array2015-01-23256/15/2015
The authors report on the design and application of a high resolution micro-electro-mechanical (MEMS) microphone array for automotive wind noise engineering. The array integrates both sensors and random access memory (RAM) chips on a flexible circuit board that eliminates high channel count wiring and allows the array to be deployed on automobile surfaces in a convenient “stick-on/peel-off” configuration. These arrays have potential application to the quantitative evaluation of interior wind noise from measurements on a clay model in the wind tunnel, when used in conjunction with a body vibro-acoustic model. The array also provides a high resolution turbulence measurement tool, suitable for validation of computation fluid dynamics (CFD) simulations for wind noise. The authors' report on the wavenumber-frequency structure of flow turbulence measured in different flow regions on a side glass and the corresponding contributions to interior wind noise.
Bremner, P., Todter, C., Clifton, S.
Precision Miniature Attitude Determination and Control SystemTBMG-221746/1/2015
The MAI-400SS Space Sextant is a turnkey Attitude Determination And Control System (ADACS) for CubeSats and nanosatellites. It is an enhanced version of the MAI-400, which is a precision CubeSat ADACS incorporating three reaction wheels, three electromagnets, and an ADACS computer in a ½-U module. This Space Sextant version incorporates two star trackers to improve overall pointing knowledge to 0.02° or better. The star trackers feature “Lost In Space” attitude determination requiring no a priori information.
MEMS Micro-Translation Stage with Large Linear Travel CapabilityTBMG-220035/1/2015
A MEMS (microelectromechanical systems) micro-translation stage (MTS) with large linear travel capability was developed that uses capacitive electrostatic forces created by stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle for precise movement of the shuttle. The device, which is essentially a linear motor built from silicon base with microfabrication techniques, will be able to rapidly translate across large distances using only three-phase power. The moveable shuttle can be as small as 100 mm and can house a variety of elements including lenses and mirrors. The shuttle can be tailored to travel distances as small as 10 mm and as large as 300 mm, with as little as 10 mm between adjacent shuttle stops.
Fully Integrated, Miniature, High-Frequency Flow Probe Utilizing MEMS Leadless SOI TechnologyTBMG-161114/1/2013
This work focused on developing, fabricating, and fully calibrating a flow-angle probe for aeronautics research by utilizing the latest microelectromechanical systems (MEMS), leadless silicon on insulator (SOI) sensor technology. While the concept of angle probes is not new, traditional devices had been relatively large due to fabrication constraints; often too large to resolve flow structures necessary for modern aeropropulsion measurements such as inlet flow distortions and vortices, secondary flows, etc. Measurements of this kind demanded a new approach to probe design to achieve sizes on the order of 0.1 in. (≈3 mm) diameter or smaller, and capable of meeting demanding requirements for accuracy and ruggedness.
Wind-Driven Wireless Networked System of Mobile Sensors for Mars ExplorationTBMG-154741/1/2013
A revolutionary way is proposed of studying the surface of Mars using a wind-driven network of mobile sensors: GOWON. GOWON would be a scalable, self-powered and autonomous distributed system that could allow in situ mapping of a wide range of environmental phenomena in a much larger portion of the surface of Mars compared to earlier missions. It could improve the possibility of finding rare phenomena such as “blueberries” or bio-signatures and mapping their occurrence, through random wind-driven search. It would explore difficult terrains that were beyond the reach of previous missions, such as regions with very steep slopes and cluttered surfaces. GOWON has a potentially long life span, as individual elements can be added to the array periodically. It could potentially provide a costeffective solution for mapping wide areas of Martian terrain, enabling leaving a long-lasting sensing and searching infrastructure on the surface of Mars.
Low-Power Distributed Jammer NetworkTBMG-143028/1/2012
The Distributed Jammer Network (DJN) is composed of a large number of tiny, low-power jammers, which are distributed inside a target network and emit radio energy to disrupt its communications. Recent advancement in microelectromechanical system (MEMS) technology makes it possible to make jammers sufficiently small that a DJN can take the form of a dust suspending in the air, thus the name Jamming Dust. Miniaturization of jammers should be less challenging than that of wireless sensors since jammers just emit noise signal without requiring complex modulation, filtering, and other signal processing functions. Therefore, new miniature devices such as nanotube radio may find their first application in jamming dust.
MEMS Deformable Mirrors Enable Imaging of Earth-Sized Extra-Solar PlanetsTBMG-144858/1/2012
The NASA-sponsored space exploration project, PICTURE (Planet Imaging Concept Testbed Using a Rocket Experiment), seeks to obtain a direct image of an extra-solar giant planet. The PICTURE telescope, which uses a BMC deformable mirror for adaptive optic wavefront control, was launched aboard a NASA sounding rocket in October 2011. Preliminary data show that the MEMS deformable mirror was successful in its operation.
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