MEMS Glow Discharge Plasma Electron and Ion Source

A microelectromechanical system (MEMS) glow discharge plasma electron and ion source (GDEIS) was designed for operation in high-pressure environments such as planetary atmospheres for mass spectroscopy. Glow discharge electron/ ion sources create electrons and ions from gas molecules in an excited plasma. A plasma is generated between two charged plates, and the polarity induced determines the electron or ion signal.