Micro-Optomechanical Pressure Sensor Advances Pressure Monitoring in Biomedical Applications

A new type of pressure sensor is based on micro-optomechanical systems (MOMS) technology. Developed by imec, a research and innovation hub focusing on nanoelectronics and digital technologies, the sensor exhibits an excellent measurement precision in a large pressure range while being compact, resistant to electromagnetic interference (EMI), and having multiplexing capabilities. Leveraging imec's unique technical expertise in both MEMS and photonics, the sensor can be used in applications that require high-quality sensing, notably in the medical and life sciences domains.