Piezoresistive Sensor

The present innovation, developed at NASA’s Goddard Space Flight Center, comprises several piezoresistor sensor configurations for sensing rotation or torque that are superior to those currently in use in microelectromechanical (MEMS) devices. These may be used for sensing rotation/torque or any other quantity that can be converted by the sensor to a rotation (as is frequently done in sensors), and are therefore of wide applicability in current and future MEMS sensors.