Ultra High Pressure sensor with MEMS sensor element mounted on the measurement membrane manufactured by MIM
2022-01-0282
03/29/2022
- Event
- Content
- This paper presents a ultra high pressure sensor composed the measurement membrane manufactured by MIM(Metal Powder Injection Molding). The membrane should be sufficiently deformed within the measuring pressure range and not be broken at the burst pressure. Therefore, in general, the high pressure sensor membrane made of metal using machining methods such as milling and drilling [1]. However, it requires additional process to assembly with other parts and is difficult to make complex structure such as screw. Thus, in this paper, we propose the product and design of the measurement membrane using the MIM method. We have developed the ultra-high pressure sensor capable of measuring to 900 bar.gauge. Figure 1 shows the ultra-high pressure and measurement part. The measurement membrane thickness is 900 ㎛ and diameter is 3.2 mm. The MEMS sensor element mounted on the measuring membrane surface outputs an electrical signal according to the pressure. The electrical circuit with ASIC calibrates its output and adjusts the output signal as shown Figure 2. As a test result of the burst pressure, the membrane is not broken. And, in all temperature and pressure operating range, we can find the output deviation is within about 1% F.S. The MIM sturcture with measurement memberane, which can impement vraious shpes, can be applied to vrious mountung and assembly parts.In addition, process simplfication and cost reduction can be expected by applying the MIM. And, the charicteristic curve and measuring pressure rnage can be adjusted using calibraion process on ASIC. Therefore, We expect the ultra high pressure sensor prposed in this paper will be efficectively applied to various system.
- Citation
- Jeon, M., "Ultra High Pressure sensor with MEMS sensor element mounted on the measurement membrane manufactured by MIM," SAE Technical Paper 2022-01-0282, 2022, .