Systems, Methods, and Apparatus of a Low-Conductance Silicon Micro-Leak for Mass Spectrometer Inlet
TBMG-24951
07/01/2016
- Content
Mass spectrometers on atmospheric entry probes require a method for introducing gas from high-pressure ambient regions to the vacuum of the mass spectrometer interior.
- Citation
- "Systems, Methods, and Apparatus of a Low-Conductance Silicon Micro-Leak for Mass Spectrometer Inlet," Mobility Engineering, July 1, 2016.