Selective Metallization for High-Temperature Semiconductors
TBMG-32071
12/01/1998
- Content
Inventors at the Cornell Research Foundation have devised a method of selective metallization of high-temperature semiconductors to produce ohmic or rectifying contacts. The process consists of three phases: a lithographic step to define the areas of contact, preparation of the semiconductor surface, and deposition of the metallization via chemical vapor deposition.
- Citation
- "Selective Metallization for High-Temperature Semiconductors," Mobility Engineering, December 1, 1998.