Micromachined Photodiode/Bolometer Arrays

Micromachined planar arrays of detectors that could operate either as photodiodes or as bolometers have been proposed for use in detecting photons in applications in which broad spectral responses are required. The availability of either of the two modes would enable operation throughout the spectrum, from x rays through infrared. Potential markets for these devices could lie in the automotive industry (infrared-image detectors for night vision), the consumer electronics industry (infrared detectors for security systems), the semiconductor industry (process-monitoring equipment), and medical electronics (x-ray detectors).