Metallization for SiC Semiconductors
TBMG-35704
12/01/2019
- Content
Scientists at NASA’s Glenn Research Center have developed and patented improved ohmic contacts, and a fabrication method for them, that will speed the production of silicon carbide (SiC) sensors and electronics that operate in high-temperature, harsh environments.
- Citation
- "Metallization for SiC Semiconductors," Mobility Engineering, December 1, 2019.