MEMS Micro-Translation Stage with Large Linear Travel Capability

A MEMS (microelectromechanical systems) micro-translation stage (MTS) with large linear travel capability was developed that uses capacitive electrostatic forces created by stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle for precise movement of the shuttle. The device, which is essentially a linear motor built from silicon base with microfabrication techniques, will be able to rapidly translate across large distances using only three-phase power. The moveable shuttle can be as small as 100 mm and can house a variety of elements including lenses and mirrors. The shuttle can be tailored to travel distances as small as 10 mm and as large as 300 mm, with as little as 10 mm between adjacent shuttle stops.