Low-Cost Detection of Thin Film Stress During Fabrication
TBMG-36868
05/01/2020
- Content
NASA’s Marshall Space Flight Center has developed a simple, cost-effective optical method for thin film stress measurements during growth and/or subsequent annealing processes. Stress arising in thin film fabrication presents production challenges for electronic devices, sensors, and optical coatings; it can lead to substrate distortion and deformation, impacting the performance of thin film products.
- Citation
- "Low-Cost Detection of Thin Film Stress During Fabrication," Mobility Engineering, May 1, 2020.