Controlled Manufacture of Porous Silicon Carbide
TBMG-32861
09/01/2018
- Content
Extremely fine porous structures with tiny holes — resembling a kind of sponge at the nano level — can be generated in semiconductors. A method was developed for the controlled manufacture of porous silicon carbide (SiC), which has significant advantages over silicon. It possesses greater chemical resistance and can be used for biological applications, for example, without any additional coating required.
- Citation
- "Controlled Manufacture of Porous Silicon Carbide," Mobility Engineering, September 1, 2018.